Nanofacility and Microfluidic Development Laboratory

LGR's MEMS and chemical analysis laboratory houses multiple wet chemical instrumentation as well as a suite of inspecdtion stations, microscopes and micro-manipulators. This facility provides nearly 300 square feet of clean room capability housing high-magnification inspection stations and spin-coating stations. This 1000 square foot lab also features several Burleigh Series 7000 micro-positioners and view scopes.

Work currently underway in this facility includes development of:

• Small latching actuators based upon a novel new microfluidic control mechanism.
• State-of-the-art microfluidic pumps for use in chemical analysis.
• New optical interconnection schemes based upon planar fabrication techniques.
• New optical waveguides based upon new polymeric materials.

The ongoing work at LGR in these areas is supplemented by our access to the Stanford University Nanofab Facility, which offers qualified uses access to some of the most sophisticated fabrication equipment available anywhere.