Rackmount - NIR
Enhanced Performance

Rackmount - NIR

Enhanced Durability

Ammonia/Oxygen Analyzer - (NH3, O2, H2O)

Ammonia/Oxygen Analyzer - (NH<sub>3</sub>, O<sub>2</sub>, H<sub>2</sub>O)

Ammonia/Oxygen Analyzer - (NH3, O2, H2O) Overview

Los Gatos Research's new Ammonia/Oxygen Analyzer provides sensitive measurements of ammonia and oxygen in ambient air or in process flows (MOCVD) with extremely high precision and sensitivity. No longer do you have to spend a lot of money or wait a long time or rely on scrubbers to measure ammonia, oxygen and water vapor with very high sensitivity – LGR’s Ammonia/Oxygen Analyzer provides direct measurements every second with extremely high precision. In addition, the Ammonia/Oxygen Analyzer can report measurements quickly (fast response time) over a very wide range of concentrations. The instrument, based on LGR’s cavity enhanced laser absorption spectroscopy, is simple to use, inexpensive to operate, and includes all components (internal vacuum pump, keyboard,mouse, video monitor) to start recording data within minutes.

The Analyzer has an internal computer (Linux OS) that can store data practically indefinitely on its hard disk drive and send real time data to a data logger via the digital (RS232) or Ethernet outputs.  Furthermore, as with all LGR analyzers, this Analyzer may be controlled remotely via the Internet. This capability allows the user to operate the analyzer using a web browser practically anywhere Internet access is available. This remote access allows the opportunity to obtain data and to diagnose the instrument operation without being on site.

The analyzer uses LGR’s patented Off-axis ICOS technology, the fourth-generation cavity enhanced absorption technique, which employs a high-finesse optical cavity as the measurement cell. LGR’s technology has many proven advantages over conventional first-generation cavity ringdown spectroscopy (CRDS) techniques. In brief, since the laser beam does not have to be resonantly coupled to the measurement cell (i.e. precise beam alignment is not critical), LGR Analyzers are relatively inexpensive, simple to build, and inherently robust thermally and mechanically.  In addition, since LGR’s technology can record reliable absorption spectra over a far wider range of optical depths (absorbance values) compared with CRDS, LGR Analyzers provide measurements over a much wider range of mole fractions (concentrations). Furthermore, due to the ease and simplicity of recording and quantifying the measured spectra using LGR’s Off-Axis ICOS, LGR Analyzers display the entire absorption spectra to the user in real time allowing for immediate system diagnostics and performance validation. Finally, only LGR's technology allows instruments to be fully serviced in the field (including the cavity mirrors) by anyone thus mitigating the need for costly factory returns.  

LGR’s new “Enhanced Performance series” incorporates proprietary internal thermal control for ultra-stable, minimal-drift measurements with unsurpassed precision and accuracy. For users wishing maximum portability, LGR’s new “Ultraportable” series provides unparalleled ease of transport for users to carry the instrument anywhere.

In brief, LGR’s Ammonia/Oxygen Analyzer provides the high quality data necessary for the most demanding applications including semiconductor process monitoring and atmospheric trace gas monitoring.  Moreover, only LGR’s analyzers provide reliable measurements at extremely high ammonia concentrations.

The Analyzer uses LGR’s patented Off-axis ICOS technology, a fourth-generation cavity enhanced absorption technique. Off-axis ICOS has many advantages over conventional cavity ringdown spectroscopy (CRDS) techniques such as being alignment insensitive, having a much shorter measurement time, and not requiring expensive and power consuming auxiliary components. For simultaneous measurements of H2S and NH3, please refer to our H2S/NHAnalyzer.  For measurements of ammonia directly in 'pure' ethylene flows (without the need for any scrubber or background subtraction), please refer to our Ammonia Analyzer.

Quite simply, no other analyzer provides higher performance or is simpler to use. (For more details, please see: advantages)